Linearization algorithms based on higher-order polynomials reduce the linearity error to less than 0.01 %. That is typically 10 times better than conventional controllers.
Each of the four optionally available analog inputs can be configured in two ways. As control input, the voltage applied is linked to one of the axes, e.g., for target values. Configuration as external sensor input allows reading of additional sensor signals, e.g., for autofocusing. Alternatively, the controller can be equipped with a fast 32-bit PIO (parallel I/O) for commanding. The PIO supports a restricted command set with 100,000 read and write commands per second required for motion.
PI offers preconfigured controllers for 3- and 6-axis operation. Moreover, customers can put controllers together exactly as required. For this purpose, various types of housings and modules as well as additional accessories are available:
During fast periodic motion, such as that typical for scanning applications, it is possible to increase the tracking accuracy by up to a factor of three using Dynamic Digital Linearization (DDL). The integrated wave generator can save and output periodic motion profiles. Preconfigured sine and triangle wave profiles are provided to support the user when defining the curve, but any user-defined waveforms are possible. Flexible configuration of the data recorder allows recording of the corresponding data.
All parameters can be set and checked via software. Easy startup and system configuration can be done via the PIMikroMove utility program, which is in the scope of delivery. Connection to the customer's software is possible via LabView drivers and DLLs. System programming is identical for all PI controllers – combined control of a variety of different controllers is therefore possible without any problems.
Preconfigured controllers |
|---|
E‑712.3CD, E-712.3CDA | E‑712.6CD, E-712.6CDA | |
|---|---|---|
Function | Modular digital controller for multi-axis piezo nanopositioning systems with capacitive sensors | Modular digital controller for multi-axis piezo nanopositioning systems with capacitive sensors |
Axes | 3 | 6 |
Processor | PC-based, 600 MHz, real-time operating system | PC-based, 600 MHz, real-time operating system |
Sampling rate, servo control | 50 kHz | 20 kHz |
Sampling rate, sensor | 50 kHz | 20 kHz |
Sensor | E‑712.3CD, E-712.3CDA | E‑712.6CD, E-712.6CDA |
|---|---|---|
Controller type | P-I, two notch filters | P-I, two notch filters |
Sensor type | Capacitive | Capacitive |
Sensor channels | 3 | 6 |
Sensor bandwidth (-3 dB) | 10 kHz | 10 kHz |
Sensor resolution | 18 (interpolated: 20) bits | 18 (interpolated: 20) bits |
External synchronization | Yes | Yes |
Amplifier | E‑712.3CD, E-712.3CDA | E‑712.6CD, E-712.6CDA |
|---|---|---|
Output voltage | -30 to 135 V | -30 to 135 V |
Amplifier channels | 4 | 8 |
Peak output power / channel* | 25 W | 25 W |
Average output power / channel | 8 W | 8 W |
Current limitation | Short-circuit proof | Short-circuit proof |
Resolution DAC | 20-bit | 20-bit |
Temperature sensor | Yes | Yes |
Interfaces and operation | E‑712.3CD, E-712.3CDA | E‑712.6CD, E-712.6CDA |
|---|---|---|
Communication interfaces | TCP/IP, USB, RS-232, SPI | TCP/IP, USB, RS-232, SPI |
Piezo / sensor connector | Sub-D Mix 25W3 | Sub-D Mix 25W3 |
Analog inputs | E-712.3CD: None E-712.3CDA: LEMO: 4 × ±10 V differential; bandwidth: max. 25 kHz; resolution: 18 bit; max. impedance: 250 Ohm | E-712.6CD: None E-712.6CDA: LEMO: 4 × ±10 V differential; bandwidth: max. 25 kHz; resolution: 18 bit; max. impedance: 250 Ohm |
Analog outputs | E-712.3CD: None E-712.3CDA: LEMO: 4 × ±10 V differential; bandwidth: max. 25 kHz; resolution: 16 bit | E-712.6CD: None E-712.6CDA: LEMO: 4 × ±10 V differential; bandwidth: max. 25 kHz; resolution: 16 bit |
Digital inputs/outputs | MDR20: 8 × TTL | MDR20: 8 × TTL |
Command set | PI General Command Set (GCS) | PI General Command Set (GCS) |
User software | PIMikroMove | PIMikroMove |
Application programming interfaces | API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW | API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW |
Supported functions | Wave generator, trigger I/O, macros | Wave generator, trigger I/O, macros |
Indicators | LEDs for OnTarget, Err, Power, Over Temp | LEDs for OnTarget, Err, Power, Over Temp |
Linearization | 4th-order polynomials, DDL option (Dynamic Digital Linearization) | 4th-order polynomials, DDL option (Dynamic Digital Linearization) |
Miscellaneous | E‑712.3CD, E-712.3CDA | E‑712.6CD, E-712.6CDA |
|---|---|---|
Operating temperature range | 5 to 40 °C | 5 to 40 °C |
Overheat protection | Max. 75 °C, deactivation of the voltage output | Max. 75 °C, deactivation of the voltage output |
Mass | E-712.3CD: 5.35 kg E-712.3CDA: 5.53 kg | E-712.6CD: 5.78 kg E-712.6CDA: 5.96 kg |
Dimensions | 9.5" housing, 236 mm × 132 mm × 296 mm + handles (47 mm length) | 9.5" housing, 236 mm × 132 mm × 296 mm + handles (47 mm length) |
Max. power consumption | 225 W | 225 W |
Operating voltage | 100 to 240 VAC, 50 to 60 Hz | 100 to 240 VAC, 50 to 60 Hz |
Housing types and modules |
|---|
Housing types | E-712.R1 / E-712.R3 | E-712.R2 / E-712.R4 | E-712.R5 |
|---|---|---|---|
Function | Chassis with power adapter | Chassis with power adapter | Chassis with cPCI bus |
Piezo voltage range | -30 to 135 V | -250 to 250 V | up to -250 to 250 V |
Channels | 3 to 6 | 3 to 6 | up to 12 |
Dimensions | E-712.R1: 9.5" (236 mm × 132 mm × 296 mm + handles (47 mm length)) E-712.R3: 19" (450 mm × 132 mm × 296 mm + handles (47 mm length)) | E-712.R2: 19" (450 mm × 132 mm × 296 mm + handles (47 mm length)) E-712.R4: 9.5" (236 mm × 132 mm × 296 mm + handles (47 mm length)) | 19" (450 mm × 177 mm × 375 mm + handles (47 mm length)) |
Mass | .R1: 4.16 kg / .R3: 6.7 kg | .R2: 6.7 kg / .R4: 4.16 kg | 4.4 kg |
Operating voltage | 100 to 240 VAC, 50-60 Hz | 100 to 240 VAC, 50-60 Hz | 100 to 240 VAC, 50-60 Hz |
Line power fuses | 2 × T2.5AH, 250 V** | 2 × T2.5AH, 250 V** | 2 × T3.15AH, 250 V** |
Current consumption, max. | 225 VA | 225 VA | 450 VA |
Max. output power | 100 W | 100 W | 200 W |
Master modules | E-712.M1 | E-712.N1 |
|---|---|---|
Function | Digital processor and interface module | Digital processor and interface module |
Supported drive type | Piezo nanopositioning systems (except PiezoWalk® systems) | Piezo nanopositioning systems, PiezoWalk® systems |
Axes | up to 16 | up to 16 |
Sampling rate, servo control | max. 50 kHz | max. 50 kHz |
Sampling rate, sensor | max. 50 kHz | max. 50 kHz |
Communication interfaces | TCP/IP, USB, RS-232, SPI | TCP/IP, USB, RS-232, SPI |
Amplifier/driver | E-711.AL4P / E-711.AL41 | E-711.AM4 / E-711.AM5 / E-711.AM6 / E-711.AM5A / E-711.AM5B | E-711.AN4 / E-711.AN40 | E-711.C82 |
|---|---|---|---|---|
Function | Amplifier module | Amplifier module | Amplifier module | Driver module |
Drive type | Piezo actuators | NEXLINE® | NEXACT® | DC motors |
Channels | 4 | 4 | 4 | 2 |
Average output power per channel | 8 W | 15 W | 4 W | 30 W |
Output voltage | -30 to 135 V | -250 to 250 V | -10 to 45 V | 0 to 24 V |
Sensor input | -- | E-711.AMx: -- E-711.AM5A: incremental, sin/cos E-711.AM5B: absolute, BiSS | -- | Incremental: A/B, sin/cos Absolute: BiSS |
Connector | E-711.AL4P: via E-711.SS3 or E-711.SC3H E-711.AL41: Sub-D 25W3 | E-711.AM4: Sub-D 24W7 E-711.AM5: Sub-D 25 (f) E-711.AM6: Via the HD Sub-D 50 (f) of the E-712.R5 chassis E-711.AM5A / .AM5B: Sub-D 25 (f) | E-711.AN4: Sub-D 15 (f) E-711.AN40: Via the HD Sub-D 78 (f) of the E-712.R5 chassis | Sub-D 15 (f) |
I/O: Sensor modules | E-711.SA3 / E-711.SA6 | E-711.SS3 | E-711.SC3H / E-711.SE3 |
|---|---|---|---|
Function | Module for incremental sensors | Module for strain gauge sensors | Module for capacitive sensors |
Sensor type | Incremental sensors (analog sin/cos, Vpp) | Strain gauge sensors, temperature sensors | E-711.SCH3: capacitive 2-electrode sensors E-711.SE3: PISeca capacitive 1-electrode sensors |
Channels | 3 / 6 | 4 | 3 |
Sensor connector | 1 × / 2 × HD Sub-D 26 (m) | Sub-D 37 (f) | Sub-D 25W3 / 3 × Lemo triaxial socket |
Sensor bandwidth | 300 kHz | 10 kHz | 10 kHz / 5 kHz |
A/D resolution | Interpolation factor selectable | 18 bits (interpolated) | 18 bits (interpolated: 20 bits) |
I/O: Sensor signal transmission | E-711.S3XC | E-711.0ET / E-711.0ET0 | E-711.0ATS |
|---|---|---|---|
Function | Set for digital sensor signal transmission, consisting of: Interface module, sensor box with signal processing electronics | Set for digital sensor signal transmission, consisting of: Interface module, sensor box with signal processing electronics; E-711.0ET additionally with sensor cable | Sensor box for digital sensor signal transmission |
Sensor type | Capacitive 2-electrode sensors | PISeca capacitive 1-electrode sensors | Absolute-measuring or incremental encoders via 32-bit BiSS interface |
Channels | 3 | 3 | 8 |
Sensor connector | Sub-D 25W3 | 3 × Lemo triaxial socket | 8 × Sub-D 9 (f) |
Sensor bandwidth | 10 kHz | max. 5 kHz | N/A |
A/D resolution | 18 bits (interpolated: 20 bits) | 20 bits interpolated | N/A |
I/O: Interface modules | E-711.IA4 | E-711.IP | E-711.iS3 / E-711.iS6 |
|---|---|---|---|
Function | Analog interface module | Parallel input/output interface module for fast data exchange | SPI master interface module |
Input/output | 4 × analog input 4 × analog output | Parallel input/output | SPI |
Channels | 4 | 15 | 3 / 6 |
Resolution | Input: 18 bit Output: 16 bit | 32-bit | 32-bit |
Bandwidth | Input: max. 25 kHz Output: max. 12 kHz | N/A | N/A |
Connector | 8 × LEMO EPG.00.302.NLN | HD Sub-D 62 (f) for connecting to a digital interface card of the PC via the cable included (K040B0121) | Display port |
* The maximum output power is limited by the power supply of the housing and the number of available modules.
** unless stated otherwise on the type plate of the housing