Producs - Nano Dünya

VT-80 V6 Linear Stage Suitable for Vacuum

Basic Version for Universal Fields of Use

Suitable for vacuum up to 10^-6 hPa
Travel ranges between 25 and 300 mm
Low profile
Max. Velocity to 10 mm/s
Load capacity to 5 kg

6230V66000

6230V61000, dimensions in mm

6230V62000, dimensions in mm

6230V64000, dimensions in mm

6230V65000, dimensions in mm

6230V66000, dimensions in mm

6230V68000, dimensions in mm

Product Description Description Specifications Downloads Quote/Order

At the moment only a limited selection of product variants is available.

Please note that at the moment only a limited selelction of variants of this product family is available. This selection can be found here on the web page. The complete list of products can be found in the PDF datasheet that is available for download.

Standard-class linear stage

Recirculating ball bearing guides and precision leadscrew for smooth and even feed. Stress-relieved aluminum base for high stability. Compact XY combinations. Two mechanical limit switches.

Recirculating ball bearing guides

When carefully assembled, recirculating ball bearing guides are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded recirculating ball bearing units, which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.

Reduced outgassing especially for use in vacuum environments

Most notably, for the lubrication of the guides and the drive screw a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa.

Drive

2-phase stepper motor for high torque even at low velocities and high resolution

Application fields

Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.

Motion	6230V61000	6230V62000	6230V64000	6230V66000	6230V68000	Tolerance
Active axes	X	X	X	X	X
Travel range in X	25 mm	50 mm	100 mm	200 mm	300 mm
Maximum velocity in X, unloaded	10 mm/s	10 mm/s	10 mm/s	10 mm/s	10 mm/s
Straightness (Linear crosstalk in Y with motion in X)	± 8 µm	± 10 µm	± 12 µm	± 20 µm	± 35 µm	typ.
Flatness (Linear crosstalk in Z with motion in X)	± 8 µm	± 10 µm	± 12 µm	± 20 µm	± 35 µm	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 100 µrad	± 110 µrad	± 130 µrad	± 170 µrad	± 210 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Positioning	6230V61000	6230V62000	6230V64000	6230V66000	6230V68000	Tolerance
Minimum incremental motion in X	0.2 µm	0.2 µm	0.2 µm	0.2 µm	0.2 µm	typ.
Unidirectional repeatability in X	± 0.4 µm	± 0.4 µm	± 0.4 µm	± 0.4 µm	± 0.4 µm	typ.
Bidirectional repeatability in X	10 µm	10 µm	10 µm	10 µm	10 µm	typ.
Limit switches	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN	Mechanical, N/C contact, to 30 V, NPN
Drive Properties	6230V61000	6230V62000	6230V64000	6230V66000	6230V68000	Tolerance
Drive type	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor
Nominal voltage	24 V	24 V	24 V	24 V	24 V
Peak voltage	48 V	48 V	48 V	48 V	48 V
Motor resolution	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.	200 Full steps/rev.
Drive force in positive direction of motion in X	40 N	40 N	40 N	40 N	40 N	typ.
Drive force in negative direction of motion in X	40 N	40 N	40 N	40 N	40 N	typ.
Mechanical Properties	6230V61000	6230V62000	6230V64000	6230V66000	6230V68000	Tolerance
Permissible push force in Y	30 N	30 N	30 N	30 N	30 N	max.
Permissible push force in Z	50 N	50 N	50 N	50 N	50 N	max.
Permissible torque in θx	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	max.
Permissible torque in θY	5 N·m	5 N·m	5 N·m	5 N·m	5 N·m	max.
Permissible torque in θZ	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	2.5 N·m	max.
Holding force in X, passive	40 N	40 N	40 N	40 N	40 N
Moved mass in X, unloaded	160 g	160 g	170 g	180 g	180 g
Drive screw type	Metric leadscrew	Metric leadscrew	Metric leadscrew	Metric leadscrew	Metric leadscrew
Drive screw pitch	1 mm	1 mm	1 mm	1 mm	1 mm
Guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide	Recirculating ball bearing guide
Overall mass	550 g	650 g	750 g	950 g	1250 g
Material	Aluminum, anodized	Aluminum, anodized	Aluminum, anodized	Aluminum, anodized	Aluminum, anodized
Miscellaneous	6230V61000	6230V62000	6230V64000	6230V66000	6230V68000	Tolerance
Operating temperature range	0 to 80 °C	0 to 80 °C	0 to 80 °C	0 to 80 °C	0 to 80 °C
Vacuum class	10⁻⁶ hPa	10⁻⁶ hPa	10⁻⁶ hPa	10⁻⁶ hPa	10⁻⁶ hPa
Maximum bake out temperature	80 °C	80 °C	80 °C	80 °C	80 °C
Connector	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)	HD D-sub 15-pin (m)
Recommended controllers / drivers	C-663.12 C-885 with C-663.12C885 ACS modular controller	C-663.12 C-885 with C-663.12C885 ACS modular controller	C-663.12 C-885 with C-663.12C885 ACS modular controller	C-663.12 C-885 with C-663.12C885 ACS modular controller	C-663.12 C-885 with C-663.12C885 ACS modular controller

3D Models

3-D model VT-80 V6

Version / Date

2021-03-26
,zip - 4 MB,

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Datasheet

Datasheet VT-80 V

Version / Date

2022-05-25
,pdf - 5 MB,

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Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020
,,,,,pdf - 736 KB,,,,,

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Documentation

User Manual VT-80

Linear Stage

Version / Date

2022-06-17
,pdf - 1 MB,

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Documentation

User Manual 6230T0003

6230V63000 Precision linear stage with stepper drive for vacuum applications (1 E-6 hPa)

Version / Date

2020-05-08
,,pdf - 294 KB,,

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Documentation

User Manual 6230T0001

6230V61000 Precision linear stage with stepper drive for vacuum applications (1 E-6 hPa)

Version / Date

2021-10-08
,pdf - 506 KB,

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6230V61000

Vacuum-compatible linear stage; 2-phase stepper motor; 25 mm travel range; 50 N load capacity; 10 mm/s maximum velocity; metric leadscrew; vacuum compatible to 10-6 hPa