Producs - Nano Dünya

A-110 PIglide LC Linear Stage with Air Bearings

Inexpensive High Performance Nanopositioning Stage

Ideal for scanning applications or high-precision positioning
Cleanroom compatible
Size of the motion platform 160 mm × 200 mm
Travel ranges to 400 mm
Load capacity to 100 N

A-110.050, A-110.100, dimensions in mm

A-100.200, A-100.300, A-100.400, dimensions in mm

Product Description Description Specifications Downloads Quote/Order

Product overview

PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and friction-free motion for the highest accuracy and reliability

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Accessories and options

Encoder
PIglide filter and air preparation kits
Single and multi-axis motion controller
XY setups and individual configurations
Base plates made of granite and systems for reducing vibration

Motion	A-110.050A1	A-110.050B1	A-110.100A1	A-110.100B1	A-110.200A1	A-110.200B1	A-110.300A1	A-110.300B1	A-110.400A1	A-110.400B1	Tolerance
Active axes	X	X	X	X	X	X	X	X	X	X
Travel range in X	50 mm	50 mm	100 mm	100 mm	200 mm	200 mm	300 mm	300 mm	400 mm	400 mm
Acceleration in X, unloaded	20 m/s²	20 m/s²	20 m/s²	20 m/s²	20 m/s²	20 m/s²	20 m/s²	20 m/s²	20 m/s²	20 m/s²	max.
Maximum velocity in X, unloaded	500 mm/s	500 mm/s	500 mm/s	500 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s
Straightness (Linear crosstalk in Y with motion in X)	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.75 µm	± 0.75 µm	± 1 µm	± 1 µm	± 1 µm	± 1 µm	max.
Flatness (Linear crosstalk in Z with motion in X)	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.75 µm	± 0.75 µm	± 1 µm	± 1 µm	± 1 µm	± 1 µm	max.
Pitch (Rotational crosstalk in θY with motion in X)	± 7.5 µrad	± 7.5 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 17.5 µrad	± 17.5 µrad	± 20 µrad	± 20 µrad	max.
Yaw (Rotational crosstalk in θZ with motion in X)	± 7.5 µrad	± 7.5 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 10 µrad	± 17.5 µrad	± 17.5 µrad	± 20 µrad	± 20 µrad	max.
Positioning	A-110.050A1	A-110.050B1	A-110.100A1	A-110.100B1	A-110.200A1	A-110.200B1	A-110.300A1	A-110.300B1	A-110.400A1	A-110.400B1	Tolerance
Bidirectional repeatability in X	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	typ.
Positioning accuracy in X, calibrated	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	typ.
Positioning accuracy in X, uncalibrated	± 1.5 µm	± 1.5 µm	± 1.5 µm	± 1.5 µm	± 2 µm	± 1.5 µm	± 3 µm	± 1.5 µm	± 4 µm	± 1.5 µm	typ.
Integrated sensor	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder
Sensor signal	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C
Sensor resolution	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm
Sensor signal period	20 µm		20 µm		20 µm		20 µm		20 µm
Reference switch	Encoder index		Encoder index		Encoder index		Encoder index		Encoder index
Limit switches	Hall effect		Hall effect		Hall effect		Hall effect		Hall effect
Drive Properties	A-110.050A1	A-110.050B1	A-110.100A1	A-110.100B1	A-110.200A1	A-110.200B1	A-110.300A1	A-110.300B1	A-110.400A1	A-110.400B1	Tolerance
Drive type	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor
Nominal voltage	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V
Peak voltage	60 V	60 V	60 V	60 V	60 V	60 V	60 V	60 V	60 V	60 V
Nominal current, RMS	1.6 A	1.6 A	1.6 A	1.6 A	3.2 A	3.2 A	3.2 A	3.2 A	3.2 A	3.2 A	typ.
Peak current, RMS	4.2 A	4.2 A	4.2 A	4.2 A	6.9 A	6.9 A	6.9 A	6.9 A	6.9 A	6.9 A	typ.
Drive force in negative direction of motion in X	20 N	20 N	20 N	20 N	39 N	39 N	39 N	39 N	39 N	39 N	typ.
Drive force in positive direction of motion in X	20 N	20 N	20 N	20 N	39 N	39 N	39 N	39 N	39 N	39 N	typ.
Peak force in negative direction of motion in X	60 N	60 N	60 N	60 N	85 N	85 N	85 N	85 N	85 N	85 N
Peak force in positive direction of motion in X	60 N	60 N	60 N	60 N	85 N	85 N	85 N	85 N	85 N	85 N
Force constant	4.1 N/A	4.1 N/A	4.1 N/A	4.1 N/A	12.3 N/A	12.3 N/A	12.3 N/A	12.3 N/A	12.3 N/A	12.3 N/A
Resistance phase-phase	11 Ω	11 Ω	11 Ω	11 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	typ.
Inductance phase-phase	6 mH	6 mH	6 mH	6 mH	1.24 mH	1.24 mH	1.24 mH	1.24 mH	1.24 mH	1.24 mH
Back EMF phase-phase	10 V·s/m	10 V·s/m	10 V·s/m	10 V·s/m	10.1 V·s/m	10.1 V·s/m	10.1 V·s/m	10.1 V·s/m	10.1 V·s/m	10.1 V·s/m	max.
Pole pitch N-N	33.6 mm	33.6 mm	33.6 mm	33.6 mm	24 mm	24 mm	24 mm	24 mm	24 mm	24 mm
Mechanical Properties	A-110.050A1	A-110.050B1	A-110.100A1	A-110.100B1	A-110.200A1	A-110.200B1	A-110.300A1	A-110.300B1	A-110.400A1	A-110.400B1	Tolerance
Guide	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload	Air bearing guide with preload
Moved mass in X, unloaded	2500 g	2500 g	2500 g	2500 g	2600 g	2600 g	2600 g	2600 g	2600 g	2600 g
Permissible push force in Z	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	100 N	max.
Overall mass	6300 g	6300 g	7500 g	7500 g	11000 g	11000 g	12000 g	12000 g	14000 g	14000 g
Material	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware	Hardcoat aluminum, stainless steel mounting hardware
Miscellaneous	A-110.050A1	A-110.050B1	A-110.100A1	A-110.100B1	A-110.200A1	A-110.200B1	A-110.300A1	A-110.300B1	A-110.400A1	A-110.400B1	Tolerance
Connector	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)
Sensor connector	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)
Operating pressure	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa
Air consumption	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3
Recommended controllers / drivers	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x
Operating temperature range	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C

3D Models

A-110 3-D model

Version / Date

zip - 9 MB

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Datasheet

Datasheet A-110

Version / Date

2021-07-07
pdf - 1 MB

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Documentation

User Manual A110D0001

A-110 PIglide LC Linear Air Bearing Stages

Version / Date

2021-05-11
pdf - 1 MB

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White Papers

Air Bearings: When to Use and When to Avoid in Your Motion Application

All Positioning Stages are not Created Equal. Author: Matt Reck, PI

Version / Date

WP4003 2015-09
pdf - 3 MB

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A-110.050A1

PIglide LC linear stage, air bearings, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V