Producs - Nano Dünya

A-123 PIglide AT3 Linear Stage with Air Bearings

High Performance Nanopositioning Stage

Ideal for scanning applications or high-precision positioning
Cleanroom compatible
Size of the motion platform 210 mm × 210 mm
Travel ranges 50 mm to 750 mm
Resolution to 1 nm

A-123, dimensions in mm.

Product Description Description Specifications Downloads Quote/Order

Product overview

The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime.

A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation.

Accessories and options

Encoder
PIglide Filter and Air Preparation Kits
Single and multi-axis motion controller
Pneumatic lock/unlock option
XY setups and individual configurations
Cable track variations
Options with counterweight for vertical (Z) orientation
Customizations available
Base plates made of granite and systems for reducing vibration

Application fields

PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Motion	A-123.050A1	A-123.050B1	A-123.100A1	A-123.100B1	A-123.200A1	A-123.200B1	A-123.350A1	A-123.350B1	A-123.500A1	A-123.500B1	A-123.750A1	A-123.750B1	Tolerance
Active axes	X	X	X	X	X	X	X	X	X	X	X	X
Travel range in X	50 mm	50 mm	100 mm	100 mm	200 mm	200 mm	350 mm	350 mm	500 mm	500 mm	750 mm	750 mm
Acceleration in X, unloaded	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	30 m/s²	max.
Maximum velocity in X, unloaded	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s	1000 mm/s
Straightness (Linear crosstalk in Y with motion in X)	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.5 µm	± 0.5 µm	± 0.75 µm	± 0.75 µm	± 1.5 µm	± 1.5 µm	max.
Flatness (Linear crosstalk in Z with motion in X)	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.25 µm	± 0.5 µm	± 0.5 µm	± 0.75 µm	± 0.75 µm	± 1.5 µm	± 1.5 µm	max.
Pitch (Rotational crosstalk in θY with motion in X)	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 7.5 µrad	± 7.5 µrad	± 7.5 µrad	± 7.5 µrad	± 10 µrad	± 10 µrad	± 12.5 µrad	± 12.5 µrad	max.
Yaw (Rotational crosstalk in θZ with motion in X)	± 5 µrad	± 5 µrad	± 5 µrad	± 5 µrad	± 7.5 µrad	± 7.5 µrad	± 7.5 µrad	± 7.5 µrad	± 10 µrad	± 10 µrad	± 12.5 µrad	± 12.5 µrad	max.
Positioning	A-123.050A1	A-123.050B1	A-123.100A1	A-123.100B1	A-123.200A1	A-123.200B1	A-123.350A1	A-123.350B1	A-123.500A1	A-123.500B1	A-123.750A1	A-123.750B1	Tolerance
Bidirectional repeatability in X	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	± 0.1 µm	typ.
Positioning accuracy in X, calibrated	± 0.3 µm	± 0.3 µm	± 0.3 µm	± 0.3 µm	± 0.3 µm	± 0.3 µm	± 0.3 µm	± 0.3 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	± 0.5 µm	typ.
Positioning accuracy in X, uncalibrated	± 1.5 µm	± 1.5 µm	± 1.5 µm	± 1.5 µm	± 2 µm	± 1.5 µm	± 3 µm	± 1.5 µm	± 3.5 µm	± 1.5 µm	± 5 µm	± 1.5 µm	typ.
Integrated sensor	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder	Incremental linear encoder	Absolute linear encoder
Sensor signal	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C	Sin/cos, 1 V peak-peak	BiSS-C
Sensor resolution	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm	4.88 nm	1 nm
Sensor signal period	20 µm		20 µm		20 µm		20 µm		20 µm		20 µm
Reference switch	Encoder index		Encoder index		Encoder index		Encoder index		Encoder index		Encoder index
Limit switches	Hall effect		Hall effect		Hall effect		Hall effect		Hall effect		Hall effect
Drive Properties	A-123.050A1	A-123.050B1	A-123.100A1	A-123.100B1	A-123.200A1	A-123.200B1	A-123.350A1	A-123.350B1	A-123.500A1	A-123.500B1	A-123.750A1	A-123.750B1	Tolerance
Drive type	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor	Ironless 3-phase linear motor
Nominal voltage	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V	48 V
Peak voltage	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V	80 V
Nominal current, RMS	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	4.4 A	typ.
Peak current, RMS	15 A	15 A	15 A	15 A	15 A	15 A	15 A	15 A	15 A	15 A	15 A	15 A	typ.
Drive force in negative direction of motion in X	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	typ.
Drive force in positive direction of motion in X	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	87.5 N	typ.
Peak force in negative direction of motion in X	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N
Peak force in positive direction of motion in X	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N	298 N
Force constant	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A	19.9 N/A
Resistance phase-phase	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	3.6 Ω	typ.
Inductance phase-phase	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH	1.2 mH
Back EMF phase-phase	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	16 V·s/m	max.
Pole pitch N-N	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm	30 mm
Mechanical Properties	A-123.050A1	A-123.050B1	A-123.100A1	A-123.100B1	A-123.200A1	A-123.200B1	A-123.350A1	A-123.350B1	A-123.500A1	A-123.500B1	A-123.750A1	A-123.750B1	Tolerance
Guide	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload	Air bearing guide with air preload
Moved mass in X, unloaded	5000 g	5000 g	5000 g	5000 g	5000 g	5000 g	5000 g	500 g	5000 g	5000 g	5000 g	5000 g
Permissible push force in Y	205 N	205 N	205 N	205 N	205 N	205 N	205 N	205 N	205 N	205 N	205 N	205 N	max.
Permissible push force in Z	410 N	410 N	410 N	410 N	410 N	410 N	410 N	410 N	410 N	410 N	410 N	410 N	max.
Permissible torque in θx	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	25 N·m	max.
Permissible torque in θY	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	10 N·m	max.
Overall mass	14000 g	14000 g	15500 g	15500 g	18000 g	18000 g	21500 g	21500 g	25000 g	25000 g	32000 g	32000 g
Material	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel
Miscellaneous	A-123.050A1	A-123.050B1	A-123.100A1	A-123.100B1	A-123.200A1	A-123.200B1	A-123.350A1	A-123.350B1	A-123.500A1	A-123.500B1	A-123.750A1	A-123.750B1	Tolerance
Connector	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)	D-sub 9W4 (m)
Sensor connector	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)	D-sub 15-pole (m)
Operating pressure	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa	515 to 585 kPa
Air consumption	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	28 L/min	max.
Air quality	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3	Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3
Recommended controllers / drivers	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x	A-81x, A-82x
Operating temperature range	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C	15 to 25 °C

3D Models

A-123 3-D model

Version / Date

2020-04-13
zip - 22 MB

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Datasheet

Datasheet A-123

Version / Date

2021-06-08
pdf - 1 MB

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Documentation

User Manual A123D0001

A-123 PIglide AT3 Series Linear Air Bearing Stage, Linear Motor Driven with Encoder Feedback

Version / Date

2021-05-17
pdf - 1 MB

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A-123.050A1

PIglide AT3 linear stage, air bearings, 50 mm travel range, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period, ironless 3-phase linear motor, 48 V