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D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

For applications with the highest precision requirements
Measuring range to 300 µm
Resolution to 0.01 nm
Linearity error to 0.01% with digital controller
E-509.CxA control electronics, compatible with E-500 piezo controller system

Motion of a piezo nanopositioning system with 0.3 nm steps, measured with a capacitive sensor from PI (lower curve) and with a highly accurate laser interferometer (model Zygo ZMI 2000, upper curve). The capacitive sensor shows a significantly higher resolution than the interferometer.

D-050.00, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

D-100.00, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads

Resolution

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/√Hz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

Application fields

High-precision positioning.

	D-050.00	D-100.00
Sensor type	Capacitive	Capacitive
Nominal measuring range	50 µm	100 µm
Extended measuring range	150 µm	300 µm
Resolution	0.001% of the measuring range	0.001% of the measuring range
Linearity error	0.01 %	0.01 %
Sensor active area	56.5 mm²	113.1 mm²
Thermal drift	50 ppm/K	50 ppm/K
Material	Aluminum	Aluminum
Cable length	1 m	1 m
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Recommended evaluation electronics	E-509.CxA	E-509.CxA
Connector	LEMO FFA.00.250.CTLC31	LEMO FFA.00.250.CTLC31

Resolution: At 3 kHz, with E-509.C3A.

Linearity error: With digital controller; to 0.05 % with E-509 analog controller.

Thermal drift: Change of active surface size in ppm (parts per million), refers to measuring range.

Ask for custom materials.

Datasheet

Datasheet D-050 • D-100

Version / Date

2022-08-31
pdf - 517 KB

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Documentation

User Manual PZ106

D-015, D-050, D-100 Capacitive Sensors

Version / Date

2003-11-05
pdf - 228 KB

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Product Note

Product Change Notification D-015

Version / Date

2021-12-20
pdf - 111 KB

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