Products PI - Sensors, Components & Accessories Nanometrology Sensors & Signal Conditioners
E-509.E PISeca Sensor Evaluation / Controller
Servo Controller Module for Three Axes, E-500 Piezo Controller System
  • E-509.E03: Electronics module, 3 axes, for capacitive sensors
  • E-509.E3: Sensor module, 3 axes, with additional servo controller for piezo systems
  • Plug-in modules for E-500 / E-501 chassis
  • ILS circuitry optimizes capacitive sensor linearity
  • Optional measurement ranges
  • Variable bandwidth (optional)

Signal evaluation and servo controller module for PISeca

The E-509.E03 and E-509.E3 are available as plug-in modules for the E-500 / E-501 chassis for high-resolution capacitive single-plate sensors in the PISeca series:

  • E-509.E03 for signal evaluation
  • E-509.E3 as servo controller module

E-509.E03

E-509.E3

Function

Sensor evaluation electronics for PISeca

Sensor / servo controller module for PISeca

Axes

3

3

Supported functions

ILS (Internal Linearized System)

ILS (Internal Linearized System)

Sensor

E-509.E03

E-509.E3

Controller type

Analog P-I and notch filter

Sensor type

PISeca single electrode, capacitive

PISeca single electrode, capacitive

Sensor channels

3

3

Sensor bandwidth

0.3 to 10 kHz (adjustable)

0.3 to 10 kHz (adjustable)

Extension factor for measurement range 1

1 (default), 2 / 2.5 / 5 (optional)

1 (default), 2 / 2.5 / 5 (optional)

Noise factor

0.14 ppm/√Hz 2

0.14 ppm/√Hz 2

External synchronization

3 synchronized channels

3 synchronized channels

Thermal drift

<1 mV/°C

<1 mV/°C

Static resolution 3

<0.001 % of the measurement range (RMS)

<0.001 % of the measurement range (RMS)

Dynamic resolution 3

<0.002 % of the measurement range (RMS)

<0.002 % of the measurement range (RMS)

Linearity error in the nominal measurement range

<0.1 % (<0.2 % for D-510.020)

<0.1 %

Electrical properties

E-509.E03

E-509.E3

Output voltage

0 to 10 V

-5 to 5 V, -10 to 0 V (selectable)

0 to 10 V

-5 to 5 V, -10 to 0 V (selectable)

Interfaces and operation

E-509.E03

E-509.E3

Sensor connection

3 × LEMO ECP.00.650.NLL.543 triaxial socket

3 × LEMO ECP.00.650.NLL.543 triaxial socket

Signal output

LEMO 6-pin FGG.0B.306.CLAD56

LEMO 6-pin FGG.0B.306.CLAD56

Linearization

ILS (Internal Linearized System)

ILS (Internal Linearized System)

Miscellaneous

E-509.E03

E-509.E3

Operating temperature range

5 to 40 °C

5 to 40 °C

Dimensions

7HP/3U

7HP/3U

Mass

0.3 kg

0.3 kg

Target ground connector

3 × banana jack, 4 mm

3 × banana jack, 4 mm

Supply voltage

±15 V, supply via E-500 system

±15 V, supply via E-500 system

1 Extension factors refer to the nominal measurement range of the respective D-510 sensor head, to be specified with the order.

2 In the nominal measurement range

3 Bandwidth: Static 300 Hz, dynamic 3 kHz

Ask about custom designs!

Datasheet
Datasheet
Datasheet E-509.E
Version / Date
2018-02-13
pdf - 127 KB
Documentation
Documentation
User Manual PZ77
E-509 Sensor / Piezo Servo-Control Module
Version / Date
2009-02-20
pdf - 1 MB
Documentation
User Manual PZ62
E-500 / E-501 Series Modular Piezo Controller: Chassis with power supply, amplifier modules (E-503, E-504, E-505, E-506, E-508), sensor and servo-control module (E-509), display and interface modules (E-515, E-517).
Version / Date
2013-07-11
pdf - 2 MB
E-509.E3
PISeca Sensor / servo controller module for capacitive single-electrode sensors, 3 axes
E-509.E03
PISeca modular evaluation electronics for single-electrode capacitive sensors, 3 axes
Direct the future with the power of the past.
Expertise
Markets Technologies
Contact
Nano Dünya Mak. San. Tic. Ltd. Şti.
Parseller Mah. Gündoğan Sok. No:8/A
Ümraniye/İstanbul

02166140039
info@nanodunya.com.tr
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