Producs - Nano Dünya

L-310 Precision Z Stage

Compact Multi-Axis Combinations with Linear and Rotation Stages

Travel range 26 mm (1")
High-resolution encoder
DC, BLDC, and stepper motors
Zero-play ball screw
Load capacity to 10 kg
Variants suitable for vacuum available

L-310.20SD

L-310, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Precision-class Z stage

High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for high stability. Vacuum-compatible product variants on request. Noncontact limit and reference switches (Hall effect). Reference switch with direction sensing in the middle of the travel range.

Drive types

.xxSD variant: 2-phase stepper motor for high torque even at low velocities and high resolution.
.023xxx variant: DC servo motor
.025xxx variant: Brushless DC motor (BLDC) for high rotational velocity. Smooth running and low wear, therefore longer lifetime.

Position measuring

Versions with DC motor: Rotary encoder
Optional: Integrated linear encoder, installed centrically.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Minimum incremental motion and slow motion

In conjunction with an ACS controller (e.g., ECMsm-4B44T-NNNNN), versions with stepper motor and integrated linear encoder (L-310.xASD) achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration achieves constant low velocities of a few sensor increments per second.

Application fields

Precision positioning in industry and research, high duty cycles.

Motion	L-310.023211	L-310.023212	L-310.023232	L-310.025212	L-310.025232	L-310.20SD	L-310.2ASD	Tolerance
Active axes	Z	Z	Z	Z	Z	Z	Z
Travel range in Z	26 mm	26 mm	26 mm	26 mm	26 mm	26 mm	26 mm
Maximum velocity in Z, unloaded	50 mm/s	50 mm/s	50 mm/s	50 mm/s	50 mm/s	15 mm/s	15 mm/s
Flatness (Linear crosstalk in X with motion in Z)	± 3 µm	± 3 µm	± 3 µm	± 3 µm	± 3 µm	± 3 µm	± 3 µm	typ.
Straightness (Linear crosstalk in Y with motion in Z)	± 3 µm	± 3 µm	± 3 µm	± 3 µm	± 3 µm	± 3 µm	± 3 µm	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Roll (Rotational crosstalk in θZ with motion in Z)	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Positioning	L-310.023211	L-310.023212	L-310.023232	L-310.025212	L-310.025232	L-310.20SD	L-310.2ASD	Tolerance
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental rotary encoder	Incremental linear encoder	Incremental rotary encoder		Incremental linear encoder
Unidirectional repeatability in Z	0.2 µm	0.2 µm	0.3 µm	0.2 µm	0.3 µm	0.3 µm	0.1 µm	typ.
Bidirectional repeatability in Z	± 0.2 µm	± 0.2 µm	± 2 µm	± 0.2 µm	± 2 µm	± 2 µm	± 0.2 µm	typ.
Minimum incremental motion in Z	0.2 µm	0.2 µm	0.3 µm	0.2 µm	0.3 µm	0.3 µm	0.05 µm	typ.
Sensor signal	Sin/cos, 1 V peak-peak	A/B quadrature, RS-422	A/B quadrature, RS-422	A/B quadrature, RS-422	A/B quadrature, RS-422		Sin/cos, 1 V peak-peak
Sensor signal period	20 µm						20 µm
Reference switch	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN
Reference switch repeatability	2 µm	2 µm	2 µm	2 µm	2 µm	2 µm	2 µm
Limit switches	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN	Hall effect, N/C contact, 5 V, NPN
Sensor resolution		50 nm		50 nm
Sensor resolution			16384 Cts./rev.	20000 Cts./rev.	20000 Cts./rev.
Drive Properties	L-310.023211	L-310.023212	L-310.023232	L-310.025212	L-310.025232	L-310.20SD	L-310.2ASD	Tolerance
Drive type	DC motor	DC motor	DC motor	Brushless DC motor	Brushless DC motor	2-phase stepper motor	2-phase stepper motor
Nominal voltage	24 V	24 V	24 V	24 V	24 V	24 V	24 V
Peak voltage	48 V	48 V	48 V	48 V	48 V	48 V	48 V
Drive force in negative direction of motion in Z	100 N	100 N	100 N	100 N	100 N	55 N	55 N	typ.
Drive force in positive direction of motion in Z	100 N	100 N	100 N	100 N	100 N	55 N	55 N	typ.
Motor resolution						200 Full steps/rev.	200 Full steps/rev.
Mechanical Properties	L-310.023211	L-310.023212	L-310.023232	L-310.025212	L-310.025232	L-310.20SD	L-310.2ASD	Tolerance
Guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide
Drive screw type	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw	Ball screw
Drive screw pitch	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm	1 mm
Moved mass in Z, unloaded	900 g	900 g	900 g	900 g	900 g	900 g	900 g
Permissible push force in Y	100 N	100 N	100 N	100 N	100 N	100 N	100 N	max.
Permissible push force in Z	100 N	100 N	100 N	100 N	100 N	55 N	55 N	max.
Permissible torque in θx	40 N·m	40 N·m	40 N·m	40 N·m	40 N·m	40 N·m	40 N·m	max.
Permissible torque in θY	80 N·m	80 N·m	80 N·m	80 N·m	80 N·m	80 N·m	80 N·m	max.
Permissible torque in θZ	80 N·m	80 N·m	80 N·m	80 N·m	80 N·m	80 N·m	80 N·m	max.
Overall mass	2700 g	2700 g	2700 g	2700 g	2700 g	2700 g	2800 g
Material	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum	Anodized aluminum
Holding force in Z, passive						50 N	50 N
Miscellaneous	L-310.023211	L-310.023212	L-310.023232	L-310.025212	L-310.025232	L-310.20SD	L-310.2ASD	Tolerance
Connector	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)
Sensor connector	D-sub 9-pin (m)						D-sub 9-pin (m)
Recommended controllers / drivers	C-863 C-885 with C-863.20C885 C-884 G-901 G-910 ACS modular controller	C-863 C-885 with C-863.20C885 C-884 G-901 G-910 ACS modular controller	C-863 C-885 with C-863.20C885 C-884 G-901 G-910 ACS modular controller	G-901 G-910 ACS modular controller	G-901 G-910 ACS modular controller	C-663.12 C-885 with C-663.12C885 G-901 G-910 ACS modular controller	C-663.12 C-885 with C-663.12C885 G-901 G-910 ACS modular controller
Operating temperature range	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C	5 to 40 °C

3D Models

L-310 3-D model

Version / Date

2017-01-10
zip - 3 MB

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Datasheet

Datasheet L-310

Version / Date

2022-05-18
pdf - 521 KB

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Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020
,,,,,pdf - 736 KB,,,,,

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Documentation

User Manual MP157

L-310 Precision Z Stage

Version / Date

1.4 2022-09-20
pdf - 1 MB

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L-310.023211

Precision Z stage; DC motor; 26 mm travel range; 100 N load capacity; 50 mm/s maximum velocity; ball screw; incremental linear encoder, 20 µm sensor signal period, sin/cos, 1 V peak-peak