Producs - Nano Dünya

V-738 High-Precision XY Stage

Clear Aperture, High Travel Accuracy and Stability, Linear Motors

Travel range 102 mm × 102 mm (4")
Large aperture, 150 mm × 150 mm
Unidirectional repeatability to 0.1 µm
Velocity to 500 mm/s
3-phase linear motor
High-resolution incremental linear encoder

V-738.056111

V-738, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

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Linear motors

Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Other travel ranges on request.

Recirculating ball bearings

When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings.

Application fields

Medical industry. Laser cutting. Scanning. Biotechnology. Metrology. AOI (Automatic Optical Inspection). Microscopy.

Motion and positioning	V-738.056111	Unit	Tolerance
Travel range	102 x 102	mm
Integrated sensor	Incremental linear encoder
Design resolution	0.001	µm
Sensor signal	Sin/cos, 1 V peak-peak, 20 µm signal period
Minimum incremental motion	0.02	µm	Typ.
Unidirectional repeatability	0.1	µm	Typ.
Bidirectional repeatability	±0.25	µm	Typ.
Angular error xry (pitch)	±40	µrad	Typ.
Angular error xrz (yaw)	±20	µrad	Typ.
Angular error yrx (pitch)	±40	µrad	Typ.
Angular error yrz (yaw)	±20	µrad	Typ.
Straightness / flatness	±2	µm	Typ.
Orthogonality	±96.963	µrad	Typ.
Velocity	500	mm/s	Max.
Acceleration in X, Y, without load	10	m/s²	Max.
Reference and limit switches	Forked photoelectric sensor, N/C contact, 5V, NPN

Mechanical properties	V-738.056111	Unit	Tolerance
Load capacity	100	N	Max.
Permissible torque in θ_X, θ_Y	130	Nm	Max.
Permissible torque in θ_Z	90	Nm	Max.
Guide	Recirculating ball bearing guide

Drive properties	V-738.056111	Unit	Tolerance
Motor type	Ironless 3-phase linear motor
Operating voltage, nominal	48	V	Nom.
Operating voltage, max.	48	V	Max.
Peak force	200	N	Max.
Nominal force	87	N	Typ.
Peak current, RMS	15	a	Typ.
Nominal current, RMS	4.4	a	Typ.
Force constant, RMS		N/A	Typ.
Motor constant	71	N/√W	Typ.
Electrical time constant	0.4	ms
Resistance phase-phase	3.6	Ω	Typ.
Inductance phase-phase	1.2	mH	Typ.
Back EMF phase-phase	16	Vs/m	Max.
Pole pitch N-N	30	mm

Miscellaneous	V-738.056111	Unit	Tolerance
Operating temperature range	5 to 40	°C
Material	Aluminum, black anodized
Moved mass in X, unloaded	16.8	kg	±5 %
Moved mass in Y, unloaded	8	kg	±5 %
Overall mass	24	kg	±5 %
Connector	2 × HD D-sub 26 (m) (motor) 2 × D-sub 15 (f) (sensor)
Recommended controller	G-901.R319 SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.11C885 (up to 20 axes) ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.

3D Models

3-D model V-738

Version / Date

zip - 2 MB

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Datasheet

Datasheet V-738

Version / Date

2020-09-16
pdf - 674 KB

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Documentation

Short Instructions MP163EK

Positioners with Magnetic Linear Motor: V-308 / V-408 / V-508 / V-52x / V-551 / V-610 / V-73x / V-741

Version / Date

4.1.0 06/2023
pdf - 872 KB

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Documentation

User Manual MP183

L-738 / V-738 Precision XY Stage

Version / Date

1.1.3 2020-06-30
pdf - 915 KB

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V-738.056111

Precision XY stage, 380 mm × 380 mm width, 102 × 102 mm travel range, 150 × 150 mm clear aperture, ironless 3-phase linear motor, 48 V, incremental linear encoder with sin/cos signal transmission, 20 µm sensor signal period

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