Piezo actuators do not require lubrication and do not cause abrasion. The all-ceramic isolated PICMA® actuators also do not require polymer isolation and are therefore ideal for vacuum applications.
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.
| Motion | P-840.10 | P-840.10V | P-840.1B | P-840.1BV | P-840.20 | P-840.2B | P-840.30 | P-840.30V | P-840.3B | P-840.40 | P-840.4B | P-840.60 | P-840.6B | Tolerance |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Active axes | Z | Z | Z | Z | Z | Z | Z | Z | Z | Z | Z | Z | Z | |
| Travel range in Z, open loop, at 0 to 100 V | 15 µm | 15 µm | 15 µm | 15 µm | 30 µm | 30 µm | 45 µm | 45 µm | 45 µm | 60 µm | 60 µm | 90 µm | 90 µm | ±20 % |
| Positioning | P-840.10 | P-840.10V | P-840.1B | P-840.1BV | P-840.20 | P-840.2B | P-840.30 | P-840.30V | P-840.3B | P-840.40 | P-840.4B | P-840.60 | P-840.6B | Tolerance |
| Resolution in Z, open loop | 0.15 nm | 0.15 nm | 0.15 nm | 0.15 nm | 0.3 nm | 0.3 nm | 0.45 nm | 0.45 nm | 0.45 nm | 0.6 nm | 0.6 nm | 0.9 nm | 0.9 nm | typ. |
| Drive Properties | P-840.10 | P-840.10V | P-840.1B | P-840.1BV | P-840.20 | P-840.2B | P-840.30 | P-840.30V | P-840.3B | P-840.40 | P-840.4B | P-840.60 | P-840.6B | Tolerance |
| Drive type | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | PICMA® | |
| Electrical capacitance in Z | 1.5 µF | 1.5 µF | 1.5 µF | 1.5 µF | 3 µF | 3 µF | 4.5 µF | 4.5 µF | 4.5 µF | 6 µF | 6 µF | 9 µF | 9 µF | ±20 % |
| Mechanical Properties | P-840.10 | P-840.10V | P-840.1B | P-840.1BV | P-840.20 | P-840.2B | P-840.30 | P-840.30V | P-840.3B | P-840.40 | P-840.4B | P-840.60 | P-840.6B | Tolerance |
| Stiffness in Z | 57 N/µm | 57 N/µm | 57 N/µm | 57 N/µm | 27 N/µm | 27 N/µm | 19 N/µm | 19 N/µm | 19 N/µm | 15 N/µm | 15 N/µm | 10 N/µm | 10 N/µm | ±20 % |
| Resonant frequency in Z, unloaded | 18 kHz | 18 kHz | 18 kHz | 18 kHz | 14 kHz | 14 kHz | 10 kHz | 10 kHz | 10 kHz | 8.5 kHz | 8.5 kHz | 6 kHz | 6 kHz | ±20 % |
| Permissible push force in Z | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | 1000 N | max. |
| Permissible pull force in Z | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | 50 N | max. |
| Permissible torque in θZ | 0.35 N·m | 0.35 N·m | 0.35 N·m | 0.35 N·m | 0.35 N·m | 0.35 N·m | 0.35 N·m | max. | ||||||
| Mass without cable | 20 g | 20 g | 20 g | 20 g | 28 g | 28 g | 46 g | 46 g | 46 g | 54 g | 54 g | 62 g | 62 g | ±5 % |
| Material | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | Housing / tip: Stainless steel | |
| Length | 32 mm | 32 mm | 32 mm | 32 mm | 50 mm | 50 mm | 68 mm | 68 mm | 68 mm | 86 mm | 86 mm | 122 mm | 122 mm | ±0,3 mm |
| Mechanical interface | Spherical tip | Spherical tip | Spherical tip | Spherical tip | Spherical tip | Spherical tip | ||||||||
| Miscellaneous | P-840.10 | P-840.10V | P-840.1B | P-840.1BV | P-840.20 | P-840.2B | P-840.30 | P-840.30V | P-840.3B | P-840.40 | P-840.4B | P-840.60 | P-840.6B | Tolerance |
| Operating temperature range | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | -20 to 80 °C | |
| Connector | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | LEMO FFA.00.250 | |
| Cable length | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | 1 m | |
| Recommended controllers / drivers | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | E-503, E-505, E-610, E-617, E-621, E-625, E-663, E-665, E-709, E-831 | |
| Vacuum class | 10⁻⁶ hPa | 10⁻⁶ hPa | 10⁻⁶ hPa |