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L-306 Compact Precision Z Stage

Compact Design, Multi-Axis Combinations

Compact design: Surface 63 × 63 mm
Stepper motors and closed-loop DC motors
Optional: Linear encoder for direct position measuring
Crossed roller guides
Noncontact reference and limit switches

L-306, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

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Compact Z stage, versatile in use

Z stage with compact size due to folded drive with belt gears. Fits onto linear stages with M6 50 mm × 50 mm connection grid (e.g., L-406).

Drive

2-phase stepper motor or closed-loop DC motor
Backlash-compensated ball screws

Position measuring

Incremental linear encoder (optional with stepper motor variants)
Noncontact optical reference and limit switches

Highly-accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position with highest accuracy directly on the platform Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Crossed roller guide

For crossed roller guides, the point contact of balls in ball guides is replaced by the line contact of hardened rollers. Consequently, they are considerably stiffer and need less preloading, which reduces friction and enables smoother running. Crossed roller guides are also characterized by high guide accuracy and load capacity. Force-guided rolling element cages prevent cage creep.

Application fields

Research. Semiconductor technology. Photonics. Automation.

Motion	L-306.011100	L-306.011112	L-306.013112	Tolerance
Active axes	Z	Z	Z
Travel range in Z	13 mm	13 mm	13 mm
Maximum velocity in Z, unloaded	5 mm/s	5 mm/s	5 mm/s
Flatness (Linear crosstalk in X with motion in Z)	± 3 µm	± 3 µm	± 3 µm	typ.
Straightness (Linear crosstalk in Y with motion in Z)	± 3 µm	± 3 µm	± 3 µm	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 175 µrad	± 175 µrad	± 175 µrad	typ.
Positioning	L-306.011100	L-306.011112	L-306.013112	Tolerance
Unidirectional repeatability in Z	0.5 µm	0.1 µm	0.1 µm	typ.
Bidirectional repeatability in Z	± 2 µm	± 0.5 µm	± 0.5 µm	typ.
Minimum incremental motion in Z	2.5 µm	0.1 µm	0.1 µm	typ.
Reference switch	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN
Limit switches	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN	Forked photoelectric sensor, N/C contact, 5 V, NPN
Integrated sensor		Incremental linear encoder	Incremental linear encoder
Sensor signal		A/B quadrature, RS-422	A/B quadrature, RS-422
Sensor resolution		5 nm	50 nm
Drive Properties	L-306.011100	L-306.011112	L-306.013112	Tolerance
Drive type	2-phase stepper motor	2-phase stepper motor	DC motor
Drive force in positive direction of motion in Z	20 N	20 N	20 N	typ.
Drive force in negative direction of motion in Z	20 N	20 N	20 N	typ.
Mechanical Properties	L-306.011100	L-306.011112	L-306.013112	Tolerance
Guide	Crossed roller guide	Crossed roller guide	Crossed roller guide
Drive screw type	Ball screw	Ball screw	Ball screw
Drive screw pitch	0.5 mm	0.5 mm	0.5 mm
Holding force in Z, passive	20 N	20 N	20 N
Moved mass in Z, unloaded	180 g	180 g	180 g
Permissible push force in Y	10 N	10 N	10 N	max.
Permissible push force in Z	20 N	20 N	20 N	max.
Permissible torque in θx	1 N·m	1 N·m	1 N·m	max.
Permissible torque in θY	1 N·m	1 N·m	1 N·m	max.
Permissible torque in θZ	2 N·m	2 N·m	2 N·m	max.
Overall mass	600 g	600 g	600 g
Material	Anodized aluminum, steel	Anodized aluminum, steel	Anodized aluminum, steel
Miscellaneous	L-306.011100	L-306.011112	L-306.013112	Tolerance
Operating temperature range	5 to 40 °C	5 to 40 °C	5 to 40 °C
Connector	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)	HD D-sub 26-pin (m)
Cable length	0.5 m	0.5 m	0.5 m
Recommended controllers / drivers	C-663.12 C-885 with C-663.12C885 ACS modular controller	C-663.12 C-885 with C-663.12C885 ACS modular controller	C-863.12 C-885 with C-863.20C885 ACS modular controller

3D Models

L-306 3-D model

Version / Date

zip - 2 MB

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Datasheet

L-306 Datasheet

Version / Date

2023-01-30
pdf - 544 KB

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Documentation

Short Instructions MP146EK

Positioners with Electric Motors: DT-xx / HPS-170 / L-xxx / LS-xxx / MTS-65 / PRS-xxx / RS-40 / UPL-120 / VT-80 / WT-xx / WT-xxx

Version / Date

2.0.0 01/2020
,,,,,pdf - 736 KB,,,,,

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Documentation

User Manual L306T0002

Compact Z positioner L-306.011100 / 011112 / 013112

Version / Date

2020-11-11
pdf - 819 KB

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L-306.011100

Compact precision Z stage; 2-phase stepper motor; 13 mm travel range; 20 N load capacity; 5 mm/s maximum velocity; ball screw; 0.5 m cable length

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L-306.011112

Compact precision Z stage; 2-phase stepper motor; 13 mm travel range; 20 N load capacity; 5 mm/s maximum velocity; ball screw; incremental linear encoder, 5 nm sensor resolution, A/B quadrature, RS-422; 0.5 m cable length

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L-306.013112

Compact precision Z stage; DC motor; 13 mm travel range; 20 N load capacity; 5 mm/s maximum velocity; ball screw; incremental linear encoder, 50 nm sensor resolution, A/B quadrature, RS-422; 0.5 cable length

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