Producs - Nano Dünya

N-565 Linear Stage with the Highest Precision

NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution

Ultraprecision: 3 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
Long travel ranges: 13 mm, 26 mm or 52 mm
Self-locking when switched off: Saves energy and reduces generation of heat
Long lifetime and high reliability due to PiezoWalk® technology
Compact design: 65 mm width, 20 mm height

N-565, dimensions in mm.

Minimum incremental motion: 3 nm steps, N-565.360 with E-861.1A1

Product Description Description Specifications Downloads Quote/Order

NEXACT® reference-class linear stage

Linear stage with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.

Application fields

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in nonmagnetic environments.

Motion	N-565.160	N-565.260	N-565.360	Tolerance
Active axes	X	X	X
Travel range in X	13 mm	26 mm	52 mm
Maximum velocity in X	10 mm/s	10 mm/s	10 mm/s
Rotational crosstalk in θY with motion in X	50 µrad	100 µrad	200 µrad	+80 %
Rotational crosstalk in θZ with motion in X	50 µrad	50 µrad	50 µrad	+60 %
Positioning	N-565.160	N-565.260	N-565.360	Tolerance
System resolution in X	0.5 nm	0.5 nm	0.5 nm
Unidirectional repeatability in X	50 nm	50 nm	50 nm	±100 %
Minimum incremental motion in X	0.003 µm	0.003 µm	0.003 µm	typ.
Integrated sensor	PIOne: Incremental linear encoder	PIOne: Incremental linear encoder	PIOne: Incremental linear encoder
Sensor resolution	0.5 nm	0.5 nm	0.5 nm
Reference switch	Optical	Optical	Optical
Drive Properties	N-565.160	N-565.260	N-565.360	Tolerance
Drive type	NEXACT® piezo walking drive	NEXACT® piezo walking drive	NEXACT® piezo walking drive
Drive force in negative direction of motion in X	10 N	10 N	10 N	typ.
Drive force in positive direction of motion in X	10 N	10 N	10 N	typ.
Mechanical Properties	N-565.160	N-565.260	N-565.360	Tolerance
Guide	Crossed roller guide	Crossed roller guide	Crossed roller guide
Holding force in X, passive	10 N	10 N	10 N	min.
Overall mass	300 g	400 g	600 g	±5 %
Permissible push force in Z	20 N	20 N	20 N	max.
Material	Aluminum, black anodized	Aluminum, black anodized	Aluminum, black anodized
Miscellaneous	N-565.160	N-565.260	N-565.360	Tolerance
Connector	HD D-sub 15 (m)	HD D-sub 15 (m)	HD D-sub 15 (m)
Sensor connector	D-sub 15-pole (f)	D-sub 15-pole (f)	D-sub 15-pole (f)
Recommended controllers / drivers	E-861.1A1	E-861.1A1	E-861.1A1
Cable length	3 m	3 m	3 m

3D Models

N-565 3-D model

Version / Date

zip - 8 MB

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Datasheet

Datasheet N-565

Version / Date

2021-02-22
pdf - 899 KB

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Documentation

User Manual MP148

N-565 NEXACT® Linear Stage

Version / Date

1.5.0 2021-02-23
pdf - 2 MB

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Documentation

Short Instructions MP137EK

NEXACT® Positioners: N-524, N-565

Version / Date

3.0.1 01/2023
pdf - 1,015 KB

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Product Note

Product Change Notification Motor Driven Products

Version / Date

2021-04-19
pdf - 917 KB

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N-565.160

Precision linear stage, 13 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 80 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive

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N-565.260

Precision linear stage, 26 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 110 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive

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N-565.360

Precision linear stage, 52 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 160 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive

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