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U-523 PILine® Linear Stage

Compact Linear Stage with Ultrasonic Piezo Motor

Fast positioning
Space-saving and light
High guiding accuracy
High sensor resolution of 10 nm
Self-locking, no heat generation at rest
Low-noise operation

U-523, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Precision-class linear positioning stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation are inexpensive and can be customized.

PILine® ultrasonic piezomotor

An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Application fields

Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, applications with limited space, vacuum applications to 10-6 hPa (optional).

Motion	U-523.25	Tolerance
Active axes	X
Travel range in X	22 mm
Maximum velocity in X	200 mm/s
Pitch (Rotational crosstalk in θY with motion in X)	± 750 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 150 µrad	typ.
Positioning	U-523.25	Tolerance
Integrated sensor	Incremental linear encoder
Bidirectional repeatability in X	± 0.2 µm	typ.
Minimum incremental motion in X	0.1 µm	typ.
Sensor resolution	10 nm
Reference switch	Optical
Drive Properties	U-523.25	Tolerance
Drive type	PILine® piezo motor, performance class 1
Drive force in X	2 N	typ.
Mechanical Properties	U-523.25	Tolerance
Guide	Crossed roller guide
Holding force in X, passive	2 N	min.
Permissible push force in Z	5 N	max.
Overall mass	140 g
Mass without cable	70 g
Material	Aluminum, anodized
Miscellaneous	U-523.25	Tolerance
Operating temperature range	0 to 40 °C
Connector	D-sub 15-pin (m)
Cable length	1.5 m
Recommended controllers / drivers	C-867.1U, C-867.10C885, C-867.2U2

3D Models

U-523.25 3-D model

Version / Date

zip - 2 MB

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Datasheet

Datasheet U-523

Version / Date

2023-02-06
pdf - 518 KB

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Documentation

User Manual MP178

For U-523.25

Version / Date

2020-12-18
pdf - 3 MB

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Documentation

Short Instructions MP121EK

PILine® Positioners: M-67x, M-68x, U-52x, U-62x, U-651, U-7xx

Version / Date

5.3.0 02/2023
pdf - 2 MB

Download

U-523.25

PILine® linear stage; PILine® piezo motor, performance class 1; 22 mm travel range; 5 N load capacity; 200 mm/s maximum velocity; incremental linear encoder, 10 nm sensor resolution; 1.5 m cable length

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