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U-521 PILine® Linear Stage

Compact Linear Stage with Ultrasonic Piezo Motor

Positions small loads quickly and with precision: Velocity to 200 mm/s, minimum incremental motion to 0.3 µm
Space-saving: Only 35 mm in width and 15 mm in height
Self-locking when switched off: Saves energy and reduces generation of heat
Silent
Customized versions on request

U-521, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Multi-axis setup consisting of two U-521 linear stages and a U-624 rotation stage, without adapter plate

Product Description Description Specifications Downloads Quote/Order

Precision-class linear positioning stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation are inexpensive and can be customized.

PILine® ultrasonic piezomotor

An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Application fields

Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, applications with limited space, vacuum applications to 10-6 hPa (optional).

Motion	U-521.23	U-521.23V	U-521.24	U-521.24V	Tolerance
Active axes	X	X	X	X
Travel range in X	18 mm	18 mm	18 mm	18 mm
Maximum velocity in X	200 mm/s	200 mm/s	200 mm/s	200 mm/s
Linearity error	8 µm	8 µm	4 µm	4 µm
Pitch (Rotational crosstalk in θY with motion in X)	± 300 µrad	± 300 µrad	± 300 µrad	± 300 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 300 µrad	± 300 µrad	± 300 µrad	± 300 µrad	typ.
Positioning	U-521.23	U-521.23V	U-521.24	U-521.24V	Tolerance
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder
System resolution in X	400 nm	400 nm	100 nm	100 nm
Bidirectional repeatability in X	± 2 µm	± 2 µm	± 0.2 µm	± 0.2 µm	typ.
Minimum incremental motion in X	2 µm	2 µm	0.3 µm	0.3 µm	typ.
Sensor resolution	400 nm	400 nm	100 nm	100 nm
Reference switch	Optical	Optical	Optical	Optical
Drive Properties	U-521.23	U-521.23V	U-521.24	U-521.24V	Tolerance
Drive type	PILine® piezo motor, performance class 1	PILine® piezo motor, performance class 1	PILine® piezo motor, performance class 1	PILine® piezo motor, performance class 1
Drive force in X	2 N	2 N	2 N	2 N	typ.
Mechanical Properties	U-521.23	U-521.23V	U-521.24	U-521.24V	Tolerance
Guide	Ball guide	Ball guide	Ball guide	Ball guide
Holding force in X, passive	2 N	2 N	2 N	2 N	min.
Permissible push force in Z	2 N	2 N	2 N	2 N	max.
Permissible pull force in Z	2 N	2 N	2 N	2 N	max.
Overall mass	160 g	160 g	160 g	160 g
Mass without cable	40 g	40 g	40 g	40 g
Material	Aluminum, anodized	Aluminum, uncoated	Aluminum, anodized	Aluminum, uncoated
Miscellaneous	U-521.23	U-521.23V	U-521.24	U-521.24V	Tolerance
Operating temperature range	0 to 40 °C	0 to 40 °C	0 to 40 °C	0 to 40 °C
Connector	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)
Cable length	1.5 m	1 m	1.5 m	1 m
Recommended controllers / drivers	C-867.1U, C-877.1U11, C-867.10C885, C-867.2U2	C-867.1U, C-877.1U11, C-867.10C885, C-867.2U2	C-867.1U, C-877.1U11, C-867.10C885, C-867.2U2	C-867.1U, C-877.1U11, C-867.10C885, C-867.2U2
Vacuum class		10⁻⁶ hPa		10⁻⁶ hPa

3D Models

U-521 3-D model

Version / Date

zip - 1 MB

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Datasheet

Datasheet U-521

Version / Date

2023-02-06
pdf - 562 KB

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Documentation

Short Instructions MP121EK

PILine® Positioners: M-67x, M-68x, U-52x, U-62x, U-651, U-7xx

Version / Date

5.3.0 02/2023
pdf - 2 MB

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Documentation

User Manual MP138

U-521 Linear Positioning Stage

Version / Date

1.3.0 2020-12-02
pdf - 1 MB

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U-521.23

PILine® linear stage; PILine® piezo motor, performance class 1; 18 mm travel range; 2 N load capacity; 200 mm/s maximum velocity; incremental linear encoder, 400 nm sensor resolution; 1.5 m cable length

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U-521.23V

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U-521.24

PILine® linear stage; PILine® piezo motor, performance class 1; 18 mm travel range; 2 N load capacity; 200 mm/s maximum velocity; incremental linear encoder, 100 nm sensor resolution; 1.5 m cable length

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U-521.24V

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