Producs - Nano Dünya

Q-521 Q‑Motion® Miniature Linear Stage

Smallest Linear Stage with Position Control, High Resolution and Affordable Price

Only 21 mm in width and 10 mm in height
Direct position measurement with integrated incremental encoder
Encoder resolution up to 1 nm
Minimum incremental motion down to 30 nm
Multi-axis system setups with adapter plate or bracket (available as an option)

Q-521.1xx, Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Q-521.2xx, Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Q-521.3xx, Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Piezoelectric inertia drive

Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special drive electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. The drives acting directly on the runner achieve velocities of max. 6 mm/s with an operating frequency of up to 20 kHz.

Direct-measuring principle

The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. Resolution 4 nm or 1 nm, depending on the version.

Application fields

Microassembly. Photonics. Optical alignment. Microscopy. Beamline instrumentation. Semiconductor technology. Testing applications.

Motion	Q-521.130	Q-521.140	Q-521.230	Q-521.240	Q-521.330	Q-521.340	Tolerance
Active axes	X	X	X	X	X	X
Travel range in X	12 mm	12 mm	22 mm	22 mm	32 mm	32 mm
Maximum velocity in X, unloaded	6 mm/s	6 mm/s	6 mm/s	6 mm/s	6 mm/s	6 mm/s	typ.
Linearity in X	3.5 µm	3.5 µm	3.5 µm	3.5 µm	3.5 µm	3.5 µm	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	± 150 µrad	typ.
Yaw (Rotational crosstalk in θZ with motion in X)	± 100 µrad	± 100 µrad	± 150 µrad	± 150 µrad	± 200 µrad	± 200 µrad	typ.
Positioning	Q-521.130	Q-521.140	Q-521.230	Q-521.240	Q-521.330	Q-521.340	Tolerance
Integrated sensor	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder	Incremental linear encoder
Unidirectional repeatability in X	25 nm	25 nm	25 nm	25 nm	30 nm	30 nm	typ.
Bidirectional repeatability in X	± 75 nm	± 40 nm	± 75 nm	± 40 nm	± 75 nm	± 40 nm	typ.
Minimum incremental motion in X	50 nm	30 nm	50 nm	30 nm	50 nm	30 nm	typ.
Sensor signal	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak	Sin/cos, 1 V peak-peak
Sensor resolution	4 nm	1 nm	4 nm	1 nm	4 nm	1 nm
Reference switch	Optical	Optical	Optical	Optical	Optical	Optical
Drive Properties	Q-521.130	Q-521.140	Q-521.230	Q-521.240	Q-521.330	Q-521.340	Tolerance
Drive type	Q-Motion® piezo motor	Q-Motion® piezo motor	Q-Motion® piezo motor	Q-Motion® piezo motor	Q-Motion® piezo motor	Q-Motion® piezo motor
Drive force in positive direction of motion in X	0.6 N	0.6 N	0.6 N	0.6 N	0.6 N	0.6 N	typ.
Drive force in negative direction of motion in X	0.6 N	0.6 N	0.6 N	0.6 N	0.6 N	0.6 N	typ.
Mechanical Properties	Q-521.130	Q-521.140	Q-521.230	Q-521.240	Q-521.330	Q-521.340	Tolerance
Guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide	Crossed roller guide
Holding force in X, passive	1.3 N	1.3 N	1.3 N	1.3 N	1.3 N	1.3 N	typ.
Overall mass	110 g	110 g	126 g	126 g	135 g	135 g
Mass without cable	24 g	24 g	34 g	34 g	48 g	48 g
Material	Stainless steel	Stainless steel	Stainless steel	Stainless steel	Stainless steel	Stainless steel
Maximum load capacity, base plate in any orientation	0.06 kg	0.06 kg	0.06 kg	0.06 kg	0.06 kg	0.06 kg
Maximum load capacity, base plate horizontal	0.3 kg	0.3 kg	0.3 kg	0.3 kg	0.3 kg	0.3 kg
Miscellaneous	Q-521.130	Q-521.140	Q-521.230	Q-521.240	Q-521.330	Q-521.340	Tolerance
Operating temperature range	0 to 40 °C	0 to 40 °C	0 to 40 °C	0 to 40 °C	0 to 40 °C	0 to 40 °C
Connector	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)	D-sub 15-pin (m)
Cable length	1 m	1 m	1 m	1 m	1 m	1 m
Recommended controllers / drivers	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885	E-873.1AT, E-873.10C885

3D Models

Q-521 3-D model

Version / Date

zip - 2 MB

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Datasheet

Datasheet Q-521

Version / Date

2023-01-26
pdf - 841 KB

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Documentation

Short Instructions MP139EK

Q-Motion® Positioners: Q-5xx, Q-6xx

Version / Date

4.2.0 12/2019
pdf - 1 MB

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Documentation

User Manual MP145

Q-521 Q-Motion Miniature Linear Positioning Stage, Piezoelectric Inertia Drive

Version / Date

1.1.2 2020-07-29
pdf - 2 MB

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Product Note

Product Change Notification Q-xxx; N-765

Version / Date

2019-03-26
pdf - 435 KB

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Q-521.130

Q-Motion® miniature linear stage, piezoelectric inertia drive, 12 mm travel range, linear encoder, 4 nm resolution, 0.6 N drive force, dimensions 21 × 30 × 10 mm (W × L × H)