Producs - Nano Dünya

P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

Travel range 100 µm
Resolution to 0.2 nm
Linearity error 0.2 %
Compact: Surface 60 mm × 60 mm
Particularly inexpensive systems (mechanics and controller)
Zero-play, high-precision flexure guide system
Outstanding lifetime due to PICMA® piezo actuators

With active control, the settling time is less than 10 ms over the entire travel range.

P-612.ZSL, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test procedures and quality assurance
Semiconductor technology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Motion	P-612.Z0L	P-612.ZSL	Tolerance
Active axes	Z	Z
Travel range in Z, open loop, at -20 to 120 V	110 µm	110 µm	+20 / -0 %
Flatness (Linear crosstalk in X with motion in Z)	± 20 nm	± 20 nm	typ.
Straightness (Linear crosstalk in Y with motion in Z)	± 20 nm	± 20 nm	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	± 10 µrad	± 10 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 10 µrad	± 10 µrad	typ.
Travel range in Z		100 µm
Linearity error in Z		0.2 %	typ.
Positioning	P-612.Z0L	P-612.ZSL	Tolerance
Resolution in Z, open loop	0.2 nm	0.2 nm	typ.
Integrated sensor		SGS, indirect position measuring
System resolution in Z		1.5 nm
Repeatability in Z		± 4 nm	typ.
Drive Properties	P-612.Z0L	P-612.ZSL	Tolerance
Drive type	PICMA®	PICMA®
Electrical capacitance in Z	3 µF	3 µF	±20 %
Mechanical Properties	P-612.Z0L	P-612.ZSL	Tolerance
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification
Stiffness in Z	0.63 N/µm	0.63 N/µm	±20 %
Resonant frequency in Z, unloaded	490 Hz	490 Hz	±20 %
Resonant frequency in Z, under load with 30 g	420 Hz	420 Hz	±20 %
Permissible push force in Z	15 N	15 N	max.
Permissible pull force in Z	10 N	10 N	max.
Overall mass	275 g	280 g	±5 %
Material	Aluminum	Aluminum
Miscellaneous	P-612.Z0L	P-612.ZSL	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Connector	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24
Cable length	1.5 m	1.5 m	±10 mm
Recommended controllers / drivers	E-610, E-621, E-625, E-665	E-610, E-621, E-625, E-665
Sensor connector		LEMO FFA.0S.304.CLAC32

3D Models

3-D-model P-612.xxL

Version / Date

zip - 179 KB

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Datasheet

Datasheet P-612.Z

Version / Date

2023-03-21
pdf - 554 KB

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Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019
pdf - 1 MB

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Documentation

User Manual PZ280

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages

Version / Date

1.0.0 2017-04-27
pdf - 2 MB

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Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19
pdf - 377 KB

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P-612.Z0L

Piezo Z stage; 110 µm travel range (open loop); LEMO connector; 1.5 m cable length

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P-612.ZSL

Piezo Z stage; 100 µm travel range; SGS, indirect position measuring; LEMO connectors; 1.5 m cable length

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