Producs - Nano Dünya

P-620.Z • P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

Travel ranges 50 µm to 250 µm (350 µm open loop)
Resolution to 0.1 nm
Linearity error only 0.02 %
Direct position measuring with capacitive sensors
X, XY, Z, XYZ versions

P-62x.ZCD / .ZCL / .Z0L, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Application fields

Interferometry
Microscopy
Nanopositioning
Biotechnology
Test applications
Semiconductor technology

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Motion	P-620.Z0L	P-620.ZCD	P-620.ZCL	P-621.Z0L	P-621.ZCD	P-621.ZCL	P-622.Z0L	P-622.ZCD	P-622.ZCL	Tolerance
Active axes	Z	Z	Z	Z	Z	Z	Z	Z	Z
Travel range in Z, open loop	65 µm	65 µm	65 µm	140 µm	140 µm	140 µm	350 µm	350 µm	350 µm	±20 %
Yaw (Rotational crosstalk in θX with motion in Z)	± 80 µrad	± 80 µrad	± 80 µrad	± 100 µrad	± 100 µrad	± 100 µrad	± 200 µrad	± 200 µrad	± 200 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	± 80 µrad	± 80 µrad	± 80 µrad	± 100 µrad	± 100 µrad	± 100 µrad	± 200 µrad	± 200 µrad	± 200 µrad	typ.
Travel range in Z		50 µm	50 µm		100 µm	100 µm		250 µm	250 µm
Linearity error in Z		0.02 %	0.02 %		0.02 %	0.02 %		0.02 %	0.02 %	typ.
Positioning	P-620.Z0L	P-620.ZCD	P-620.ZCL	P-621.Z0L	P-621.ZCD	P-621.ZCL	P-622.Z0L	P-622.ZCD	P-622.ZCL	Tolerance
Resolution in Z, open loop	0.1 nm	0.1 nm	0.1 nm	0.2 nm	0.2 nm	0.2 nm	0.5 nm	0.5 nm	0.5 nm	typ.
Integrated sensor		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring		Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution in Z		0.2 nm	0.2 nm		0.3 nm	0.3 nm		1 nm	1 nm
Bidirectional repeatability in Z		± 1 nm	± 1 nm		± 1 nm	± 1 nm		± 1 nm	± 1 nm	typ.
Drive Properties	P-620.Z0L	P-620.ZCD	P-620.ZCL	P-621.Z0L	P-621.ZCD	P-621.ZCL	P-622.Z0L	P-622.ZCD	P-622.ZCL	Tolerance
Drive type	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®	PICMA®
Electrical capacitance in Z	0.7 µF	0.7 µF	0.7 µF	3 µF	3 µF	3 µF	6.2 µF	6.2 µF	6.2 µF	±20 %
Short-term maximum operating frequency	333 Hz	333 Hz	333 Hz	263 Hz	263 Hz	263 Hz	120 Hz	120 Hz	120 Hz
Mechanical Properties	P-620.Z0L	P-620.ZCD	P-620.ZCL	P-621.Z0L	P-621.ZCD	P-621.ZCL	P-622.Z0L	P-622.ZCD	P-622.ZCL	Tolerance
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification	Flexure guide with lever amplification
Stiffness in Z	0.5 N/µm	0.5 N/µm	0.5 N/µm	0.6 N/µm	0.6 N/µm	0.6 N/µm	0.24 N/µm	0.24 N/µm	0.24 N/µm	±20 %
Resonant frequency in Z, under load with 30 g	690 Hz	690 Hz	690 Hz	500 Hz	500 Hz	500 Hz	270 Hz	270 Hz	270 Hz	±20 %
Resonant frequency in Z, unloaded	1000 Hz	1000 Hz	1000 Hz	790 Hz	790 Hz	790 Hz	360 Hz	360 Hz	360 Hz	±20 %
Permissible push force in Y	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible push force in Z	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	10 N	max.
Permissible pull force in Z	5 N	5 N	5 N	8 N	8 N	8 N	8 N	8 N	8 N	max.
Overall mass	120 g	120 g	120 g	170 g	170 g	170 g	240 g	240 g	240 g
Material	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum	Aluminum
Miscellaneous	P-620.Z0L	P-620.ZCD	P-620.ZCL	P-621.Z0L	P-621.ZCD	P-621.ZCL	P-622.Z0L	P-622.ZCD	P-622.ZCL	Tolerance
Connector	LEMO FFS.00.250.CTCE24	D-sub 7W2 (m)	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24	D-sub 7W2 (m)	LEMO FFS.00.250.CTCE24	LEMO FFS.00.250.CTCE24	D-sub 7W2 (m)	LEMO FFS.00.250.CTCE24
Recommended controllers / drivers	E-503, E-505, E-610	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754	E-503, E-505, E-610, E-621, E-625, E-709.1C1L, E-754
Cable length	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m	1.5 m
Operating temperature range	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C	-20 to 150 °C	-20 to 80 °C	-20 to 80 °C
Sensor connector		D-sub 7W2 (m)	LEMO for capacitive sensors		D-sub 7W2 (m)	LEMO for capacitive sensors		D-sub 7W2 (m)	LEMO for capacitive sensors

3D Models

P-62x.Z 3-D model

Version / Date

zip - 327 KB

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Datasheet

Datasheet P-620.Z – P-622.Z

Version / Date

2021-11-11
pdf - 371 KB

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Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019
pdf - 1 MB

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Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

Version / Date

1.3.0 2021-11-03
pdf - 3 MB

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Product Note

Product Change Notification Piezo Actuator Driven Products

Version / Date

2021-04-19
pdf - 377 KB

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P-620.Z0L

Precise PIHera vertical nanopositioning stage, 65 µm, without sensor, LEMO connectors