Producs - Nano Dünya

P-750 Piezo Nanopositioner

High-Load Piezo-Driven Nanopositioner with Direct Metrology

1 nm lateral guiding accuracy
Frictionless, high-precision flexure guiding system
Load capacity to 10 kg
Resolution <1 nm
Direct metrology with capacitive sensors for highest precision
Direct drive for Fast response
Travel range 75 µm
Outstanding lifetime due to PICMA^® piezo actuators

P-750, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Outstanding lifetime due to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Motion	P-750.20	Tolerance
Active axes	X
Travel range in X	75 µm
Travel range in X, open loop, at -20 to 120 V	75 µm	+20 / -0 %
Roll (Rotational crosstalk in θX with motion in X)	± 10 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in X)	± 10 µrad	typ.
Positioning	P-750.20	Tolerance
Integrated sensor	Capacitive, direct position measuring
System resolution in X	1 nm
Resolution in X, open loop	0.4 nm	typ.
Drive Properties	P-750.20	Tolerance
Drive type	PICMA®
Electrical capacitance in X	7.7 µF	±20 %
Mechanical Properties	P-750.20	Tolerance
Guide	Flexure guide with lever amplification
Resonant frequency in X, unloaded	600 Hz	±20 %
Permissible push force in Z	100 N	max.
Overall mass	2.55 kg
Miscellaneous	P-750.20	Tolerance
Connector	LEMO FFS.00.250.CTCE24
Sensor connector	LEMO FFA.00.250.CTLC31
Cable length	1 m
Recommended controllers / drivers	E-500 • E-501, E-610, E-621, E-625, E-665, E-709, E-754