Producs - Nano Dünya

P-733.Z High Dynamics Z Nanopositioning Stage

Direct Position Measuring and Clear Aperture

Travel range 100 µm
Direct position measuring with capacitive sensors
Resolution to 0.3 nm, closed loop
Clear aperture 50 mm × 50 mm
Other versions available with additional degrees of freedom
XY and XYZ versions available
Vacuum-compatible versions on request

Step response of the P-733.ZCD. Settling time is 10 ms.

P-733.Z, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Product Description Description Specifications Downloads Quote/Order

Application fields

Scanning microscopy
Confocal microscopy
Mask/wafer positioning
Surface measuring technology
Nanoimprinting
Micromanipulation
Image processing / stabilization
Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA^® piezo actuators

The patented PICMA^® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA^® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control.

Motion	P-733.ZCD	P-733.ZCL	Tolerance
Active axes	Z	Z
Travel range in Z	100 µm	100 µm
Travel range in Z, open loop, at -20 to 120 V	115 µm	115 µm	+20 / -0 %
Linearity error	0.03 %	0.03 %	typ.
Yaw (Rotational crosstalk in θX with motion in Z)	< 5 µrad	< 5 µrad	typ.
Pitch (Rotational crosstalk in θY with motion in Z)	< 5 µrad	< 5 µrad	typ.
Roll (Rotational crosstalk in θZ with motion in Z)	< 10 µrad	< 10 µrad	typ.
Positioning	P-733.ZCD	P-733.ZCL	Tolerance
Repeatability	< 2 nm	< 2 nm	typ.
Resolution, open loop	0.2 nm	0.2 nm	typ.
Integrated sensor	Capacitive, direct position measuring	Capacitive, direct position measuring
System resolution	0.3 nm	0.3 nm	typ.
Drive Properties	P-733.ZCD	P-733.ZCL	Tolerance
Drive type	PICMA®	PICMA®
Electrical capacitance	6 µF	6 µF	±20 %
Mechanical Properties	P-733.ZCD	P-733.ZCL	Tolerance
Stiffness	2.5 N/µm	2.5 N/µm	±20 %
Resonant frequency in Z, unloaded	700 Hz	700 Hz	±20 %
Resonant frequency in Z, under load with 120 g	530 Hz	530 Hz	±20 %
Resonant frequency in Z, under load with 200 g	415 Hz	415 Hz	±20 %
Permissible push force in Z	50 N	50 N	max.
Permissible pull force in Z	20 N	20 N	max.
Guide	Flexure guide with lever amplification	Flexure guide with lever amplification
Overall mass	580 g	580 g	±5 %
Material	Aluminum	Aluminum
Miscellaneous	P-733.ZCD	P-733.ZCL	Tolerance
Operating temperature range	-20 to 80 °C	-20 to 80 °C
Connector	D-sub 7W2 (m)	LEMO FFS.00.250.CTCE24
Cable length	1.5 m	1.5 m	±10 mm
Recommended controllers / drivers	E-503, E-505, E-610, E-621, E-625, E-754	E-503, E-505, E-610, E-621, E-625, E-754
Sensor connector		LEMO FFA.00.250.CTLC 17

3D Models

P-733.Z 3-D model

Version / Date

zip - 370 KB

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Datasheet

Datasheet P-733.Z

Version / Date

2023-09-13
pdf - 815 KB

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Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

Version / Date

6.1.0 10/2019
pdf - 1 MB

Download

Documentation

User Manual PZ103

P-733, P-734 Piezo Nanopositioning Systems with Capacitive Sensors

Version / Date

1.1.0 2020-10-26
pdf - 2 MB

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P-733.ZCD

High dynamics Z nanopositioning stage; 100 µm travel range; capacitive, direct position measuring; D-sub 7W2 (m); 1.5 m cable length

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P-733.ZCL

High dynamics Z nanopositioning stage; 100 µm travel range; capacitive, direct position measuring; LEMO connectors; 1.5 m cable length

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Application fields

Outstanding lifetime thanks to PICMA® piezo actuators

Subnanometer resolution with capacitive sensors

High guiding accuracy due to zero-play flexure guides

Automatic configuration and fast component exchange

Maximum accuracy due to direct position measuring

Outstanding lifetime thanks to PICMA^® piezo actuators